Robotics Repair Service

• Basic overhaul for customer inventory

• Repair of failure mode and replace all comsumable parts

• 4 weeks lead-time

• Robot, Controller, Aligner & Loadport


Robotics Repair Service

Service Available

Basic overhaul for customer inventory / Repair of failure mode and replace all comsumable parts

/ 4 weeks lead-time / Robot, Controller, Aligner & Loadport


Tool Refurbishment

ETCH Tool Refurbishment


Conducting refurbishment according to the target specifications of used equipment. 


Equipped with an optimal cleanroom for refurbishment. 

Established facilities and utility systems optimized for system testing. 

Utilizing N2 and He gases for wafer seasoning and plasma testing.

Staffed with engineers having long-standing experience from 

  equipment manufacturers and extensive project experience. 


System Manufacturing and Assembly Service

Etch System Refurbishment

Etch System Retrofit (Version Upgrade, Size Conversion)

• Etch System Site Set-up


Tool Refurbishment

Conducting refurbishment according to the target specifications of used equipment. 


Equipped with an optimal cleanroom for refurbishment. 

Established facilities and utility systems optimized for system testing. 

Utilizing N2 and He gases for wafer seasoning and plasma testing.

Staffed with engineers having long-standing experience from equipment manufacturers and extensive project experience. 


System Manufacturing and Assembly Service

Etch System Refurbishment

Etch System Retrofit (Version Upgrade, Size Conversion)

• Etch System Site Set-up


Part Development

Valuetech has been involving to design new vacuum chuck and supplying to KLA's LCD inspection equipment for over 10 years. Value Tech is supplying about 1,000 pcs per year thru technology oriented SCM Customer has many difficulties due to high cost, quality control, and delivery issues, but Value Tech provided satisfactory results to customers through efficient process improvement.

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Part Development

Involving to design new vacuum chuck

Valuetech has been involving to design new vacuum chuck and supplying to KLA's LCD inspection equipment for over 10 years. Value Tech is supplying about 1,000 pcs per year thru technology oriented SCM Customer has many difficulties due to high cost, quality control, and delivery issues, but Value Tech provided satisfactory results to customers through efficient process improvement.