• Conducting refurbishment according to the target specifications of used equipment.
• Equipped with an optimal cleanroom for refurbishment.
• Established facilities and utility systems optimized for system testing.
• Utilizing N2 and He gases for wafer seasoning and plasma testing.
• Staffed with engineers having long-standing experience from
equipment manufacturers and extensive project experience.
• System Manufacturing and Assembly Service
• Etch System Refurbishment
• Etch System Retrofit (Version Upgrade, Size Conversion)
• Etch System Site Set-up