TEST SYSTEM
Functional Test System
• Identical functional test system same
as fab conditions
• Functional test system utilizing actual
fab equipment or same functional tools
• Marathon / Burn-in test for 72 hrs
before shipping
• Outgassing remove and high vacuum test
for Vacuum Robot
TEST SYSTEM
Functional Test System
• Identical functional test system same as fab conditions
• Functional test system utilizing actual fab equipment
or same functional tools
• Marathon / Burn-in test for 72 hrs before shipping
• Outgassing remove and high vacuum test for Vacuum Robot
