Refurbishment Work Scope
STEP ①
Tool Fab-in & Inspection
Based on the target specifications of the tool, check a system.
STEP ②
Disassembly
STEP ③
Cleaning & Preparation
Full Cleaning (Tool body, Cables, Covers, ETC) / Parts Overhaul & Repair
STEP ④
Assembly
Add and replace parts according to the tool's target specifications.
STEP ⑤
Function Test
Tool Calibration & Vertification
N2 Plasma Turn-on Test
STEP ⑥
Final Test
Austo Seasoning Test
Refurbishment Work Scope
STEP ①
Tool Fab-in & Inspection
Based on the target specifications of the tool,
check a system.
STEP ④
Assembly
Add and replace parts according to the tool's target specifications.
STEP ②
Disassembly
.
STEP ⑤
Function Test
Tool Calibration & Vertification
Plasma Turn-on Test
STEP ③
Cleaning & Preparation
Full Cleaning (Tool body, Cables, Covers, ETC)
Parts Overhaul & Repair
STEP ⑥
Final Test
Auto Seasoning Test
